Invention Grant
- Patent Title: Integrated elastomeric lipseal and cup bottom for reducing wafer sticking
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Application No.: US14936328Application Date: 2015-11-09
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Publication No.: US10053793B2Publication Date: 2018-08-21
- Inventor: Aaron Berke , Robert Rash , Steven T. Mayer , Santosh Kumar , Lee Peng Chua
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D17/06
- IPC: C25D17/06 ; C25D17/08 ; C25D17/00 ; C25D7/12 ; C25D5/02 ; H01L21/67 ; H01L21/687

Abstract:
Disclosed are electroplating cups for holding, sealing, and providing electrical power to wafers during electroplating, where the electroplating cup can include a cup bottom, an elastomeric lipseal, and an electrical contact element. The cup bottom can include a radially inwardly protruding surface with a plurality of through-holes. The elastomeric lipseal can directly adhere to the radially inwardly protruding surface of the cup bottom, fill the plurality of through-holes, and encircle an inner edge of the cup bottom. In some implementations, this can mitigate the effects of wafer sticking. In some implementations, the cup bottom may be treated to promote adhesion between the elastomeric lipseal and the radially inwardly protruding surface of the cup bottom.
Public/Granted literature
- US20170009369A1 INTEGRATED ELASTOMERIC LIPSEAL AND CUP BOTTOM FOR REDUCING WAFER STICKING Public/Granted day:2017-01-12
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