- Patent Title: Crystal growth apparatus and thermal insulation cover of the same
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Application No.: US14675220Application Date: 2015-03-31
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Publication No.: US10053797B2Publication Date: 2018-08-21
- Inventor: Lu-Chung Chuang , Chih-Chieh Yu , Wen-Chieh Lan , I-Ching Li , Wen-Ching Hsu , Jiunn-Yih Chyan
- Applicant: GLOBALWAFERS CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: GLOBALWAFERS CO., LTD.
- Current Assignee: GLOBALWAFERS CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Apex Juris, pllc.
- Agent Lynette Wylie
- Priority: TW103205818U 20140403
- Main IPC: C30B35/00
- IPC: C30B35/00 ; C30B15/10 ; C30B15/14 ; C30B11/00

Abstract:
A crystal growth apparatus includes a crucible, a heating device, a thermal insulation cover, and a driving device. The crucible contains materials to be melted, wherein the heating device heats the crucible to melt the materials; the thermal insulation cover is provided upon the materials, wherein the thermal insulation cover includes a main body, which has a bottom surface facing an interior of the crucible, and a insulating member being provided at the main body; the driving device moves the thermal insulation cover towards or away from the materials, whereby, the thermal insulation cover effectively blocks heat conduction and heat convection, which prevents thermal energy from escaping out of the crucible.
Public/Granted literature
- US20150284876A1 CRYSTAL GROWTH APPARATUS AND THERMAL INSULATION COVER OF THE SAME Public/Granted day:2015-10-08
Information query
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