Invention Grant
- Patent Title: Super-resolution observation device and super-resolution observation method
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Application No.: US15276397Application Date: 2016-09-26
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Publication No.: US10054545B2Publication Date: 2018-08-21
- Inventor: Fumihiro Dake , Hiroki Yazawa
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-075615 20140401
- Main IPC: G01N21/64
- IPC: G01N21/64 ; G02B21/00 ; G01N21/63 ; G02B21/08 ; G02B21/16 ; G02B21/36 ; G02F1/11

Abstract:
A super-resolution observation device includes an illumination optical system that focus a first illuminating light at optical frequency ω1 and a second illuminating light at optical frequency ω2 on a region of an observation object plane; a modulation unit that modulates a property of the first illuminating light heading toward the region at a modulation frequency fm; and an extraction unit that extracts a component at the optical frequency ω1 or ω2 from a light generated in the region according to the first illuminating light and the second illuminating light, the component of which the property changes at a frequency higher than the modulation frequency fm.
Public/Granted literature
- US20170082546A1 SUPER-RESOLUTION OBSERVATION DEVICE AND SUPER-RESOLUTION OBSERVATION METHOD Public/Granted day:2017-03-23
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