Invention Grant
- Patent Title: X-ray transmission inspection apparatus and inspection method using the same
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Application No.: US15220880Application Date: 2016-07-27
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Publication No.: US10054555B2Publication Date: 2018-08-21
- Inventor: Yoshiki Matoba , Akihiro Takeda , Shingo Tsuboi , Toshihiro Sakai
- Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JP2015-149138 20150729
- Main IPC: G01N23/04
- IPC: G01N23/04 ; G01S17/08

Abstract:
Disclosed are an X-ray transmission inspection apparatus and an inspection method using the same that are capable of preventing over-detection and erroneous detection of foreign matter even when variations in vertical position of the sample occur. The X-ray transmission inspection apparatus includes: an X-ray source (2) irradiating a sample with X-rays; a sample moving device (3) moving the sample S continuously to a predetermined direction while X-rays X are emitted from the X-ray source; a time delay integration sensor (TDI sensor) (4) provided opposed to the X-ray source based on the sample, and detecting the X-rays transmitted through the sample; a distance sensor (5) measuring a distance between the X-ray source and the sample; and a TDI controller (6) controlling the TDI sensor by changing a charge transfer speed of the TDI sensor (4) in real time based on variations in the distance measured by the distance sensor.
Public/Granted literature
- US20170031054A1 X-RAY TRANSMISSION INSPECTION APPARATUS AND INSPECTION METHOD USING THE SAME Public/Granted day:2017-02-02
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