Invention Grant
- Patent Title: Polishing method
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Application No.: US15357706Application Date: 2016-11-21
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Publication No.: US10056277B2Publication Date: 2018-08-21
- Inventor: Yoichi Kobayashi , Yoichi Shiokawa , Katsuhide Watanabe
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Baker & Hostetler LLP
- Priority: JP2015-229002 20151124
- Main IPC: B24B37/00
- IPC: B24B37/00 ; H01L21/67 ; H01L21/3105 ; H01L21/66 ; B24B37/013 ; B24B37/10 ; B24B37/20 ; B24B37/32 ; B24B49/10 ; B24B49/12

Abstract:
A polishing method capable of obtaining a stable film thickness without being affected by a difference in measurement position is disclosed. The polishing method includes: rotating a polishing table that supports a polishing pad; pressing the surface of the wafer against the polishing pad; obtaining a plurality of film-thickness signals from a film thickness sensor during a latest predetermined number of revolutions of the polishing pad, the film thickness sensor being installed in the polishing table; determining a plurality of measured film thicknesses from the plurality of film-thickness signals; determining an estimated film thickness at a topmost portion of the raised portion based on the plurality of measured film thicknesses; and monitoring polishing of the wafer based on the estimated film thickness at the topmost portion of the raised portion.
Public/Granted literature
- US20170148655A1 POLISHING METHOD Public/Granted day:2017-05-25
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