Invention Grant
- Patent Title: Integrated electroacoustic MEMS transducer with improved sensitivity and manufacturing process thereof
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Application No.: US15636423Application Date: 2017-06-28
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Publication No.: US10057684B2Publication Date: 2018-08-21
- Inventor: Matteo Perletti , Stefano Losa , Lorenzo Tentori , Maria Carolina Turi
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT102016000121533 20161130
- Main IPC: H04R7/18
- IPC: H04R7/18 ; B81B3/00 ; B81C1/00 ; H04R19/04 ; H04R19/00

Abstract:
An electroacoustic MEMS transducer, having a substrate of semiconductor material; a through cavity in the substrate; a back plate carried by the substrate through a plate anchoring structure, the back plate having a surface facing the through cavity; a fixed electrode, extending over the surface of the back plate; a membrane of conductive material, having a central portion facing the fixed electrode and a peripheral portion fixed to the surface of the back plate through a membrane anchoring structure; and a chamber between the membrane and the back plate, peripherally delimited by the membrane anchoring structure.
Public/Granted literature
- US20180152788A1 INTEGRATED ELECTROACOUSTIC MEMS TRANSDUCER WITH IMPROVED SENSITIVITY AND MANUFACTURING PROCESS THEREOF Public/Granted day:2018-05-31
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