Invention Grant
- Patent Title: Lead frame-based chip carrier used in the fabrication of MEMS transducer packages
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Application No.: US14930907Application Date: 2015-11-03
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Publication No.: US10057688B2Publication Date: 2018-08-21
- Inventor: Jay Scott Salmon
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Michael Best & Friedrich LLP
- Main IPC: H04R19/00
- IPC: H04R19/00 ; H04R1/04 ; B81C1/00 ; H04R19/04

Abstract:
Systems and methods for lead frame-based chip carriers for use with MEMS transducers. One embodiment provides a method for manufacturing a MEMS microphone package. In one exemplary embodiment, the method includes flip chip bonding a first plurality of I/O pads on an application specific integrated circuit to a plurality of traces on a lead frame. The method further includes removing at least one of the plurality of traces such that at least one of the first plurality of I/O pads is electrically isolated from the lead frame. The method further includes bonding the lead frame to a lid and electrically connecting, via at least one wire bond, a MEMS microphone mounted to the lid to the application specific integrated circuit using a second plurality of I/O pads of the application specific integrated circuit. The method further includes bonding a substrate to the lead frame to form an air tight volume within the lid.
Public/Granted literature
- US20160134974A1 LEAD FRAME-BASED CHIP CARRIER USED IN THE FABRICATION OF MEMS TRANSDUCER PACKAGES Public/Granted day:2016-05-12
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