Invention Grant
- Patent Title: Manufacturing method of power-module substrate
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Application No.: US14652554Application Date: 2013-12-03
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Publication No.: US10057993B2Publication Date: 2018-08-21
- Inventor: Hiroya Ishizuka
- Applicant: MITSUBISHI MATERIALS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Locke Lord LLP
- Agent James E. Armstrong, IV; Nicholas J. DiCeglie, Jr.
- Priority: JP2012-275157 20121217
- International Application: PCT/JP2013/082449 WO 20131203
- International Announcement: WO2014/097880 WO 20140626
- Main IPC: B23K1/00
- IPC: B23K1/00 ; H05K3/20 ; H01L23/373 ; H01L21/48 ; C04B37/02 ; B23K1/19

Abstract:
A manufacturing method of power-module substrate (10), the power-module substrate (10) being obtained by joining a circuit layer (12) made of copper to one surface of a ceramic substrate (11) and joining a heat-radiation layer (13) made of aluminum to the other surface of the ceramic substrate (11), including: a circuit layer bonding step in which the circuit layer (12) is brazed on the ceramic substrate (11), a surface treatment step after the circuit layer bonding step in which a thickness of an oxide film on the other surface of the ceramic substrate (11) is made 3.2 nm or less at least at a peripheral part of an intended bonding area between the ceramic substrate (11) and the heat-radiation layer (13), and a heat-radiation layer bonding step in which the heat-radiation layer (13) is brazed on the other surface of the ceramic substrate (11) after the surface treatment step.
Public/Granted literature
- US20150289385A1 MANUFACTURING METHOD OF POWER-MODULE SUBSTRATE Public/Granted day:2015-10-08
Information query
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