Invention Grant
- Patent Title: Integrated circuits including a dummy metal feature and methods of forming the same
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Application No.: US15263830Application Date: 2016-09-13
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Publication No.: US10062641B2Publication Date: 2018-08-28
- Inventor: Haifeng Sheng , Shifeng Zhao , Juan Boon Tan , Soh Yun Siah
- Applicant: Globalfoundries Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Lorenz & Kopf, LLP
- Main IPC: H01L27/11551
- IPC: H01L27/11551 ; H01L23/522 ; H01L23/528 ; H01L27/115 ; H01L21/768

Abstract:
Integrated circuits and methods of forming the same are provided herein. In an embodiment, an integrated circuit includes a semiconductor substrate that has an isolated well. A multilayer metallization stack overlies the semiconductor substrate. The multilayer metallization stack includes a metal layer, a functional via, and a dummy metal feature. The metal layer includes a first line in electrical communication with the isolated well through a contact. The functional via is in electrical communication with the first line and the contact. The dummy metal feature is in electrical communication with the functional via.
Public/Granted literature
- US20180076128A1 INTEGRATED CIRCUITS INCLUDING A DUMMY METAL FEATURE AND METHODS OF FORMING THE SAME Public/Granted day:2018-03-15
Information query
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