Invention Grant
- Patent Title: Innovative approach of 4F2 driver formation for high-density RRAM and MRAM
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Application No.: US15347255Application Date: 2016-11-09
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Publication No.: US10062735B2Publication Date: 2018-08-28
- Inventor: Yu-Wei Ting , Chi-Wen Liu , Chun-Yang Tsai , Kuo-Ching Huang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/24 ; H01L27/22 ; H01L29/423 ; H01L29/78

Abstract:
Some embodiments of the present disclosure relate to an integrated chip having a vertical transistor device. The integrated chip may have a semiconductor body with a trench extending along first sides of a source region, a channel region over the source region, and a drain region over the channel region. A gate electrode is arranged along a first sidewall of the trench, and a metal contact is arranged on the drain region. An isolation dielectric material is disposed within the trench. The isolation dielectric material is vertically over a top surface of the gate electrode and is laterally adjacent to the gate electrode.
Public/Granted literature
- US20170062525A1 INNOVATIVE APPROACH OF 4F2 DRIVER FORMATION FOR HIGH-DENSITY RRAM AND MRAM Public/Granted day:2017-03-02
Information query
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