Invention Grant
- Patent Title: GaN-based power electronic device and method for manufacturing the same
-
Application No.: US15368098Application Date: 2016-12-02
-
Publication No.: US10062775B2Publication Date: 2018-08-28
- Inventor: Sen Huang , Xinyu Liu , Xinhua Wang , Ke Wei , Qilong Bao , Wenwu Wang , Chao Zhao
- Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Beijing
- Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Beijing
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: CN201610265883 20160426
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/00 ; H01L29/778 ; H01L29/66 ; H01L29/205 ; H01L29/20 ; H01L29/15 ; H01L21/306

Abstract:
A GaN-based power electronic device and a method for manufacturing the same is provided. The GaN-based power electronic device comprising a substrate and an epitaxial layer over the substrate. The epitaxial layer comprises a GaN-based heterostructure layer, a superlattice structure layer and a P-type cap layer. The superlattice structure layer is provided over the heterostructure layer, and the P-type cap layer is provided over the superlattice structure layer. By using this electronic device, gate voltage swing and safe gate voltage range of the GaN-based power electronic device manufactured on the basis of the P-type cap layer technique may be further extended, and dynamic characteristics of the device may be improved. Therefore, application process for the GaN-based power electronic device that is based on the P-type cap layer technique will be promoted.
Public/Granted literature
- US20170309736A1 GAN-BASED POWER ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2017-10-26
Information query
IPC分类: