Invention Grant
- Patent Title: Cleaning systems and methods for semiconductor substrate storage articles
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Application No.: US15031334Application Date: 2014-10-20
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Publication No.: US10065222B2Publication Date: 2018-09-04
- Inventor: Lutz Rebstock
- Applicant: BROOKS AUTOMATION (GERMANY) GmbH
- Applicant Address: DE Ernst-Ruska-Ring Jena
- Assignee: Brooks Automation (Germany) GmbH
- Current Assignee: Brooks Automation (Germany) GmbH
- Current Assignee Address: DE Ernst-Ruska-Ring Jena
- Agency: Perman & Green, LLP
- Agent Colin Durham
- International Application: PCT/IB2014/065458 WO 20141020
- International Announcement: WO2015/059615 WO 20150430
- Main IPC: B08B9/093
- IPC: B08B9/093 ; B08B9/34 ; H01L21/67 ; B08B3/08 ; B08B3/10 ; B08B3/12 ; B08B5/02 ; B08B9/08 ; H01L21/673 ; B08B9/28

Abstract:
Provided are methods and systems for cleaning various semiconductor substrate storage articles, in particular, FOUP doors. The FOUP doors and other similar articles often have openings that may get contaminated with cleaning liquids if not covered. The described cleaning system includes contact points for engaging the article and covering these openings. The contact points may be also used for supporting the article and for pressurizing the openings in the article with a gas. The gas may be supplied through one or more contact points. It prevents liquids from getting into the openings if even the openings are not completely sealed. The pressurization may be maintained through the entire wet portion of the cleaning process. The article may be rotated within the cleaning system while cleaning and/or other liquids or gases are dispensed through a set of spraying nozzles. Spraying nozzles may move to enhance cleaning of the article.
Public/Granted literature
- US20160271658A1 CLEANING SYSTEMS AND METHODS FOR SEMICONDUCTOR SUBSTRATE STORAGE ARTICLES Public/Granted day:2016-09-22
Information query
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