Invention Grant
- Patent Title: Additives for orientation control of block copolymers
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Application No.: US15250139Application Date: 2016-08-29
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Publication No.: US10066040B2Publication Date: 2018-09-04
- Inventor: Joy Cheng , Anindarupa Chunder , Daniel P. Sanders , Ankit Vora
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Michael R. Roberts
- Main IPC: C08F212/14
- IPC: C08F212/14 ; C08F220/24 ; C08F220/68 ; C09D169/00 ; C09D133/16 ; C09D127/12 ; C09D125/08 ; C08L69/00 ; C08L25/08 ; C08G64/18 ; B81C1/00 ; C08F12/20 ; C08F12/22 ; C08F212/08 ; C09D125/18 ; C08F220/04 ; H01L21/027

Abstract:
A film layer comprising a high-chi (χ) block copolymer for self-assembly and a surface active polymer (SAP) was prepared on a substrate surface that was neutral wetting to the domains of the self-assembled block copolymer. The block copolymer comprises at least one polycarbonate block and at least one other block (e.g., a styrene-based block). The SAP comprises a hydrophobic fluorinated first repeat unit and a non-fluorinated second repeat unit bearing at least one pendent OH group present as an alcohol or acid (e.g., carboxylic acid). The film layer, whose top surface has contact with an atmosphere, self-assembles to form a lamellar or cylindrical domain pattern having perpendicular orientation with respect to the underlying surface. Other morphologies (e.g., islands and holes of height 1.0Lo) were obtained with films lacking the SAP. The SAP is preferentially miscible with, and lowers the surface energy of, the domain comprising the polycarbonate block.
Public/Granted literature
- US20160362513A1 ADDITIVES FOR ORIENTATION CONTROL OF BLOCK COPOLYMERS Public/Granted day:2016-12-15
Information query
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