Invention Grant
- Patent Title: Source container and vapour-deposition reactor
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Application No.: US14388764Application Date: 2013-03-26
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Publication No.: US10066295B2Publication Date: 2018-09-04
- Inventor: Myung Gi Lee , Yong Eui Lee , Un Jung Kim
- Applicant: UNITEX CO., LTD
- Applicant Address: KR Gyeonggi-do
- Assignee: UNITEX CO., LTD.
- Current Assignee: UNITEX CO., LTD.
- Current Assignee Address: KR Gyeonggi-do
- Priority: KR10-2012-0031891 20120328
- International Application: PCT/KR2013/002496 WO 20130326
- International Announcement: WO2013/147491 WO 20131003
- Main IPC: B01F3/02
- IPC: B01F3/02 ; B01F5/00 ; C23C14/22 ; C23C14/24 ; C23C16/44 ; C23C16/448 ; C23C16/455

Abstract:
The present invention relates to a source container and to a vapor-deposition reactor. The source container according to one embodiment of the present invention comprises: a container comprising an inner wall for delimiting a first space for holing a source material, and a second space which is adjacent to the first space and is for the mixing of vapor emitted from the source material and a carrier gas taken into the inside thereof; a carrier gas inflow pathway which connects the outside of the container second space; a mixed gas discharge pathway which connects the outside of the container and the second space; and a flow-limiting member which expands inside the second space, and provides a first flow barrier surface between the inflow port and the discharge port.
Public/Granted literature
- US20150053134A1 SOURCE CONTAINER AND VAPOUR-DEPOSITION REACTOR Public/Granted day:2015-02-26
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