Invention Grant
- Patent Title: Multi-contact lipseals and associated electroplating methods
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Application No.: US14990725Application Date: 2016-01-07
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Publication No.: US10066311B2Publication Date: 2018-09-04
- Inventor: John Floyd Ostrowski , Robert Rash
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D17/00
- IPC: C25D17/00 ; C25D7/12

Abstract:
Disclosed herein are lipseal assemblies for use in an electroplating clamshell for engaging and supplying electrical current to a semiconductor substrate during electroplating, which include an elastomeric lipseal for engaging the semiconductor substrate during electroplating, and wherein upon engagement the elastomeric lipseal forms multiple radially-separated sealing contact surfaces with the substrate which substantially exclude plating solution from a peripheral region of the substrate. Said lipseal assemblies may also include one or more electrical contact elements for supplying electrical current to the semiconductor substrate during electroplating.
Public/Granted literature
- US20160201212A1 MULTI-CONTACT LIPSEALS AND ASSOCIATED ELECTROPLATING METHODS Public/Granted day:2016-07-14
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