Invention Grant
- Patent Title: Isoelectronic surfactant induced sublattice disordering in optoelectronic devices
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Application No.: US15654576Application Date: 2017-07-19
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Publication No.: US10066318B2Publication Date: 2018-09-04
- Inventor: Christopher M. Fetzer , James H. Ermer , Richard R. King , Peter C. Colter
- Applicant: THE BOEING COMPANY
- Applicant Address: US IL Chicago
- Assignee: THE BOEING COMPANY
- Current Assignee: THE BOEING COMPANY
- Current Assignee Address: US IL Chicago
- Agency: Patterson+Sheridan, LLP
- Main IPC: C30B25/00
- IPC: C30B25/00 ; C30B25/18 ; H01L21/02 ; H01L31/18 ; H01L31/0687 ; C30B29/40
Abstract:
A method of disordering a layer of an optoelectronic device including; growing a plurality of lower layers; introducing an isoelectronic surfactant; growing a layer; allowing the surfactant to desorb; and growing subsequent layers all performed at a low pressure of 25 torr.
Public/Granted literature
- US20170321347A1 ISOELECTRONIC SURFACTANT INDUCED SUBLATTICE DISORDERING IN OPTOELECTRONIC DEVICES Public/Granted day:2017-11-09
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