Invention Grant
- Patent Title: Shape measuring device
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Application No.: US15696199Application Date: 2017-09-06
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Publication No.: US10066932B2Publication Date: 2018-09-04
- Inventor: Yuji Akishiba , Takashi Atoro
- Applicant: Keyence Corporation
- Applicant Address: JP Osaka
- Assignee: Keyence Corporation
- Current Assignee: Keyence Corporation
- Current Assignee Address: JP Osaka
- Agency: Kilyk & Bowersox, P.L.L.C.
- Priority: JP2016-201048 20161012
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B11/24 ; G01B11/30

Abstract:
To provide a shape measuring device capable of measuring a surface shape of a measuring object at high speed and with high accuracy in a wide measurement range while configuring the shape measuring device compact. A movable section 141 and a balancing section 142 are supported by a supporting section 125 and reciprocatingly moved by a driving unit 150 with respect to the supporting section 125 in opposite directions each other.
Public/Granted literature
- US20180100732A1 Shape Measuring Device Public/Granted day:2018-04-12
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