Invention Grant
- Patent Title: Calibration structure and calibration method for calibrating optical measuring devices
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Application No.: US15706723Application Date: 2017-09-17
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Publication No.: US10067028B2Publication Date: 2018-09-04
- Inventor: Nils Haverkamp , Dominik Seitz
- Applicant: Carl Zeiss Industrielle Messtechnik GmbH
- Applicant Address: DE Oberkochen
- Assignee: CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH
- Current Assignee: CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH
- Current Assignee Address: DE Oberkochen
- Agency: Ewers & Hasselmann PLLC
- Priority: DE102016218360 20160923
- Main IPC: G01M11/02
- IPC: G01M11/02

Abstract:
A calibration structure for calibrating optical measuring devices is provided. The calibration structure includes a plurality of zones adjoining one another in a plane, wherein the zones adjoin one another along straight lines and/or curved lines and the calibration structure has both zones adjoining one another along straight lines and zones adjoining one another along curved lines, wherein the zones adjoining one another along straight lines or the zones adjoining one another along curved lines have respectively mutually different optical properties. Furthermore, a calibration method for calibrating the optical measuring devices by the calibration structure is provided.
Public/Granted literature
- US20180088001A1 CALIBRATION STRUCTURE AND CALIBRATION METHOD FOR CALIBRATING OPTICAL MEASURING DEVICES Public/Granted day:2018-03-29
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