Invention Grant
- Patent Title: Method and apparatus for fabricating electrostatic capacitance-type acceleration sensor and electrostatic capacitance-type acceleration sensor
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Application No.: US14388520Application Date: 2013-03-15
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Publication No.: US10067155B2Publication Date: 2018-09-04
- Inventor: Takahiro Tsunoda , Takashi Kunimi , Toru Sekine
- Applicant: AKEBONO BRAKE INDUSTRY CO., LTD. , JAPAN OIL, GAS AND METALS NATIONAL CORPORATION
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: AKEBONO BRAKE INDUSTRY CO., LTD.,JAPAN OIL, GAS AND METALS NATIONAL CORPORATION
- Current Assignee: AKEBONO BRAKE INDUSTRY CO., LTD.,JAPAN OIL, GAS AND METALS NATIONAL CORPORATION
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2012-078169 20120329
- International Application: PCT/JP2013/057467 WO 20130315
- International Announcement: WO2013/146368 WO 20131003
- Main IPC: G01P15/08
- IPC: G01P15/08 ; B81B7/00 ; G01P15/125 ; B81C1/00 ; B81B3/00

Abstract:
In a method for fabricating an electrostatic capacitance-type acceleration sensor having a capacitor which electrostatic capacitance between a movable electrode and a fixed electrode changes according to the displacement of the movable electrode, the method includes: a step of forming a groove on at least one of the surface of an insulative substrate and the surface of a semiconductor substrate; a step of forming a hole in the semiconductor substrate so as to penetrate the semiconductor substrate at a position communicating with a passage formed by the groove; and a step of forming an electrode extraction hole in the insulative substrate so as to penetrate the insulative substrate, at a position communicating with the passage formed by the groove.
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