Invention Grant
- Patent Title: Optical scanner, optical scanning method and non-transient recording medium
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Application No.: US14810675Application Date: 2015-07-28
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Publication No.: US10067339B2Publication Date: 2018-09-04
- Inventor: Sueo Ueno
- Applicant: KABUSHIKI KAISHA TOSHIBA , TOSHIBA TEC KABUSHIKI KAISHA
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA,TOSHIBA TEC KABUSHIKI KAISHA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA,TOSHIBA TEC KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Amin, Turocy & Watson LLP
- Main IPC: G02B26/10
- IPC: G02B26/10 ; G03G15/04 ; G02B26/08 ; G03G15/043
Abstract:
An optical scanner comprises a light source, an MEMS mirror and a position detector. The light source emits a light beam. The MEMS mirror deflects the light beam emitted from the light source. The position detector detects the position of the MEMS mirror. The position detector is configured on the same semiconductor substrate with the MEMS mirror.
Public/Granted literature
- US20170031154A1 OPTICAL SCANNER, OPTICAL SCANNING METHOD AND NON-TRANSIENT RECORDING MEDIUM Public/Granted day:2017-02-02
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