Invention Grant
- Patent Title: Integrated circuits and coupled inductors with isotropic magnetic cores, and methods for fabricating the same
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Application No.: US15920961Application Date: 2018-03-14
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Publication No.: US10068694B2Publication Date: 2018-09-04
- Inventor: Lulu Peng , Donald Ray Disney
- Applicant: Globalfoundries Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Lorenz & Kopf, LLP
- Main IPC: H03K17/78
- IPC: H03K17/78 ; H01F27/28 ; H01L23/498 ; H01F27/24 ; H01F1/147

Abstract:
Integrated circuits and coupled inductors with isotropic magnetic cores, and methods for fabricating integrated circuits and coupled inductors with isotropic magnetic cores are provided. In an embodiment, a method for fabricating an integrated circuit is provided. The method includes providing a semiconductor substrate and forming an isotropic magnetic core bottom yoke over the semiconductor substrate. Further, the method includes forming an inductor coil over the isotropic magnetic core bottom yoke. Also, the method includes forming isotropic magnetic core sidewalls over the isotropic magnetic core bottom yoke and around the inductor coil. The method includes forming an isotropic magnetic core top yoke over the isotropic magnetic core sidewalls and over the inductor coil.
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