Invention Grant
- Patent Title: Sample holder
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Application No.: US14893417Application Date: 2014-06-27
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Publication No.: US10068783B2Publication Date: 2018-09-04
- Inventor: Masahiro Sato
- Applicant: KYOCERA Corporation
- Applicant Address: JP Kyoto-Shi, Kyoto
- Assignee: KYOCERA CORPORATION
- Current Assignee: KYOCERA CORPORATION
- Current Assignee Address: JP Kyoto-Shi, Kyoto
- Agency: Volpe and Koenig, P.C.
- Priority: JP2013/174348 20130826
- International Application: PCT/JP2014/067155 WO 20140627
- International Announcement: WO2015/029575 WO 20150305
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/683 ; H01L21/687 ; C30B25/18 ; C30B29/06

Abstract:
A sample holder of the present invention includes a base body formed of ceramic substrates laminated to each other and having an upper surface functioning as a sample holding surface. In this sample holder, the base body includes a first ceramic substrate including a flow path for a heating medium and a second ceramic substrate which is laminated at an upper side than the first ceramic substrate, which has an upper surface functioning as the sample holding surface, and which is formed of the same material as that of the first ceramic substrate, and the average grain diameter of ceramic grains forming the second ceramic substrate is smaller than that of ceramic grains forming the first ceramic substrate.
Public/Granted literature
- US20160126117A1 SAMPLE HOLDER Public/Granted day:2016-05-05
Information query
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