Invention Grant

Sample holder
Abstract:
A sample holder of the present invention includes a base body formed of ceramic substrates laminated to each other and having an upper surface functioning as a sample holding surface. In this sample holder, the base body includes a first ceramic substrate including a flow path for a heating medium and a second ceramic substrate which is laminated at an upper side than the first ceramic substrate, which has an upper surface functioning as the sample holding surface, and which is formed of the same material as that of the first ceramic substrate, and the average grain diameter of ceramic grains forming the second ceramic substrate is smaller than that of ceramic grains forming the first ceramic substrate.
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