Invention Grant
- Patent Title: Communication device and method for controlling communication device
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Application No.: US15031305Application Date: 2014-09-16
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Publication No.: US10068788B2Publication Date: 2018-09-04
- Inventor: Yoshifumi Tanimoto
- Applicant: MURATA MACHINERY, LTD.
- Applicant Address: JP Kyoto
- Assignee: MURATA MACHINERY, LTD.
- Current Assignee: MURATA MACHINERY, LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2013-223188 20131028
- International Application: PCT/JP2014/004759 WO 20140916
- International Announcement: WO2015/064000 WO 20150507
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/66 ; H01L21/02 ; H01L21/768 ; H01L23/535 ; H01L21/677 ; G05B19/418

Abstract:
A communication device includes a communicator that performs communication via a network, IO ports that connect with a manufacturing apparatus, a packet monitor that monitors, via the communicator, packet data communicated to and from the manufacturing apparatus via the network, an IO monitor that monitors states of the IO ports, and a controller configured or programmed to transmit monitoring information to a transportation apparatus via the communicator, the transportation apparatus transporting a processing target, and the monitoring information being obtained through the monitoring performed by the packet monitor and the IO monitor.
Public/Granted literature
- US20160276192A1 COMMUNICATION DEVICE AND METHOD FOR CONTROLLING COMMUNICATION DEVICE Public/Granted day:2016-09-22
Information query
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