Invention Grant
- Patent Title: Semiconductor device and method of forming WLCSP with semiconductor die embedded within interconnect structure
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Application No.: US15088349Application Date: 2016-04-01
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Publication No.: US10068877B2Publication Date: 2018-09-04
- Inventor: KyungHoon Lee , HyunJin Song , Kyoungll Huh , DaeSik Choi
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L25/065 ; H01L21/56 ; H01L23/538 ; H01L23/00 ; H01L23/31

Abstract:
A semiconductor device includes a semiconductor die. An encapsulant is deposited over the semiconductor die. An insulating layer is formed over the encapsulant and a first surface of the semiconductor die. A semiconductor component is disposed over the insulating layer and first surface of the semiconductor die. A first interconnect structure is formed over the encapsulant and first surface of the semiconductor die to embed the semiconductor component. A conductive via is formed in the semiconductor die. A heat sink is formed over the semiconductor die. A second interconnect structure is formed over a second surface of the semiconductor die opposite the first surface. A conductive layer is formed over the semiconductor component. An opening is formed in the insulating layer.
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