Invention Grant
- Patent Title: Array substrate of OLED display device and manufacturing method thereof
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Application No.: US15327403Application Date: 2017-01-13
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Publication No.: US10068955B2Publication Date: 2018-09-04
- Inventor: Chunsheng Jiang
- Applicant: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Shenzhen
- Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Shenzhen
- Agency: JMD Davis Ben-David
- Priority: CN201611262923 20161230
- International Application: PCT/CN2017/071162 WO 20170113
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/32 ; H01L21/265 ; H01L21/3213 ; H01L21/768 ; H01L21/311 ; H01L51/56 ; H01L29/49 ; H01L21/02 ; H01L21/306 ; H01L21/308 ; H01L21/266 ; H01L29/66 ; H01L29/786 ; H01L27/12 ; H01L51/50
Abstract:
A manufacturing method of an array substrate of an OLED display device is provided. Active areas of a first thin film transistor T1 and a second thin film transistor T2 are formed by a first mask; channel doping areas, source electrode doping areas and drain electrode doping areas of T1 and T2 are formed by a second mask; gate electrodes of T1 and T2 are formed by a third mask; vias are formed by a fourth mask; source electrodes and drain electrodes of T1 and T2, a data line and a pixel electrode are formed by a fifth mask. The manufacturing method can simplify the process steps.
Public/Granted literature
- US20180212010A1 ARRAY SUBSTRATE OF OLED DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2018-07-26
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