Invention Grant
- Patent Title: Structure and formation method of semiconductor device structure with metal gate
-
Application No.: US14290569Application Date: 2014-05-29
-
Publication No.: US10068982B2Publication Date: 2018-09-04
- Inventor: Che-Cheng Chang , Tung-Wen Cheng , Mu-Tsang Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L21/8238 ; H01L29/66 ; H01L29/423 ; H01L29/40 ; H01L27/092

Abstract:
A structure and a formation method of a semiconductor device structure are provided. The semiconductor device structure includes a semiconductor substrate and a gate stack over the semiconductor substrate. The gate stack includes a work function layer and a metal filling over the work function layer. The semiconductor device structure also includes a dielectric structure over the semiconductor substrate and adjacent to the gate stack. The dielectric structure is in direct contact with the work function layer and the metal filling.
Public/Granted literature
- US20150348965A1 STRUCTURE AND FORMATION METHOD OF SEMICONDUCTOR DEVICE STRUCTURE WITH METAL GATE Public/Granted day:2015-12-03
Information query
IPC分类: