Invention Grant
- Patent Title: Vertical FETs with high density capacitor
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Application No.: US15469882Application Date: 2017-03-27
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Publication No.: US10069007B2Publication Date: 2018-09-04
- Inventor: Brent A. Anderson
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/94 ; H01L29/78 ; H01L27/07 ; H01L29/66 ; H01L21/8234 ; H01L27/06 ; H01L49/02

Abstract:
A technique relates to semiconductors. A bottom terminal of a transistor and bottom plate of a capacitor are positioned on the substrate. A spacer is arranged on the bottom terminal of the transistor. A transistor channel region extends vertically from the bottom terminal through the spacer to contact a top terminal of the transistor. A capacitor channel region extends vertically from the bottom plate to contact a top plate of the capacitor. A first gate stack is arranged along sidewalls of the transistor channel region and is in contact with the spacer. A second gate stack is arranged along sidewalls of the capacitor channel region and is disposed on the bottom plate. A distance from a bottom of the first gate stack to a top of the bottom terminal is greater than a distance from a bottom of the second gate stack to a top of the bottom plate.
Public/Granted literature
- US20170294536A1 VERTICAL FETS WITH HIGH DENSITY CAPACITOR Public/Granted day:2017-10-12
Information query
IPC分类: