Invention Grant
- Patent Title: Method of forming an infrared photodetector
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Application No.: US15287218Application Date: 2016-10-06
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Publication No.: US10069032B2Publication Date: 2018-09-04
- Inventor: Peter Dixon , Navneet Masaun
- Applicant: Sensors Unlimited, Inc.
- Applicant Address: US NJ Princeton
- Assignee: Sensors Unlimited, Inc.
- Current Assignee: Sensors Unlimited, Inc.
- Current Assignee Address: US NJ Princeton
- Agency: Kinney & Lange, P.A.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/18 ; H01L31/112 ; H01L31/0224 ; H01L27/146

Abstract:
A low noise infrared photodetector has an epitaxial heterostructure that includes a photodiode and a transistor. The photodiode includes a high sensitivity narrow bandgap photodetector layer of first conductivity type, and a collection well of second conductivity type in contact with the photodetector layer. The transistor includes the collection well, a transfer well of second conductivity type that is spaced from the collection well and the photodetector layer, and a region of first conductivity type between the collection and transfer wells. The collection well and the transfer well are of different depths, and are formed by a single diffusion.
Public/Granted literature
- US20170170358A1 METHOD OF FORMING AN INFRARED PHOTODETECTOR Public/Granted day:2017-06-15
Information query
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