Invention Grant
- Patent Title: Semiconductor structure and manufacturing method thereof
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Application No.: US15014871Application Date: 2016-02-03
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Publication No.: US10077187B2Publication Date: 2018-09-18
- Inventor: Li-Chen Yen , Yi-Hsien Chang , Chun-Ren Cheng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C., Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: H01L21/78
- IPC: H01L21/78 ; B81C1/00 ; H01L23/544

Abstract:
A semiconductor manufacturing method includes providing a wafer. A layer is formed over a surface of the wafer where the layer is able to form a eutectic layer with a conductive element. The layer is partially removed so as to form a plurality of mesas. The wafer is bonded to a substrate through the plurality of mesas. The substrate is thinned down to a thickness so as to be less than a predetermined value.
Public/Granted literature
- US20170217769A1 SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF Public/Granted day:2017-08-03
Information query
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