Invention Grant
- Patent Title: Polishing slurry composition
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Application No.: US15205684Application Date: 2016-07-08
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Publication No.: US10077381B2Publication Date: 2018-09-18
- Inventor: Dong Kyu Choi , Young Ho Yoon , Hyun Goo Kong , Jin Sook Hwang , Han Teo Park
- Applicant: K.C. Tech Co., Ltd.
- Applicant Address: KR Anseong-si
- Assignee: KCTech Co., Ltd.
- Current Assignee: KCTech Co., Ltd.
- Current Assignee Address: KR Anseong-si
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: KR10-2015-0104263 20150720; KR10-2015-0112432 20150810
- Main IPC: B44C1/22
- IPC: B44C1/22 ; C03C15/00 ; C03C25/68 ; C23F1/00 ; C09G1/02 ; C23F3/06

Abstract:
A polishing slurry composition is provided. The polishing slurry composition includes at least two types of abrasive particles among first abrasive particles, second abrasive particles, and third abrasive particles, and an oxidizer. A peak-to-valley roughness Rpv decreases when a contact area between the abrasive particles and a tungsten-containing film increases.
Public/Granted literature
- US20170022391A1 POLISHING SLURRY COMPOSITION Public/Granted day:2017-01-26
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