Invention Grant
- Patent Title: Self-assembled structures, method of manufacture thereof and articles comprising the same
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Application No.: US14020343Application Date: 2013-09-06
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Publication No.: US10078261B2Publication Date: 2018-09-18
- Inventor: Sangho Cho , Guorong Sun , Karen L. Wooley , James W. Thackeray , Peter Trefonas, III
- Applicant: The Texas A&M University System , Rohm and Haas Electronic Materials LLC
- Applicant Address: US MA Marlborough US TX College Station
- Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLC,THE TEXAS A&M UNIVERSITY SYSTEM
- Current Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLC,THE TEXAS A&M UNIVERSITY SYSTEM
- Current Assignee Address: US MA Marlborough US TX College Station
- Agency: Cantor Colburn LLP
- Main IPC: C08L51/00
- IPC: C08L51/00 ; G03F7/038 ; C08F293/00 ; C08G61/08 ; G03F7/00 ; G03F7/004 ; G03F7/039

Abstract:
Disclosed herein is a graft block copolymer comprising a first block polymer; the first block polymer comprising a backbone polymer and a first graft polymer; where the first graft polymer comprises a surface energy reducing moiety that comprises a halocarbon moiety, a silicon containing moiety, or a combination of a halocarbon moiety and a silicon containing moiety; a second block polymer; the second block polymer being covalently bonded to the first block; wherein the second block comprises the backbone polymer and a second graft polymer; where the second graft polymer comprises a functional group that is operative to undergo acid-catalyzed deprotection causing a change of solubility of the graft block copolymer in a developer solvent.
Public/Granted literature
- US20150072291A1 SELF-ASSEMBLED STRUCTURES, METHOD OF MANUFACTURE THEREOF AND ARTICLES COMPRISING THE SAME Public/Granted day:2015-03-12
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