Invention Grant
- Patent Title: Vertical memory devices and methods of manufacturing the same
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Application No.: US15271605Application Date: 2016-09-21
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Publication No.: US10079203B2Publication Date: 2018-09-18
- Inventor: Yong-Hoon Son , Cha-Dong Yeo , Han-Mei Choi , Kyung-Hyun Kim , Phil-Ouk Nam , Kwang-Chul Park , Yeon-Sil Sohn , Jin-I Lee , Won-Bong Jung
- Applicant: Yong-Hoon Son , Cha-Dong Yeo , Han-Mei Choi , Kyung-Hyun Kim , Phil-Ouk Nam , Kwang-Chul Park , Yeon-Sil Sohn , Jin-I Lee , Won-Bong Jung
- Applicant Address: KR Gyeonggie-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggie-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2015-0134754 20150923
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L27/11582 ; H01L21/768 ; H01L27/11565 ; H01L27/11575 ; H01L27/1157

Abstract:
A vertical memory device includes a substrate, a plurality of channels on the substrate and extending in a vertical direction with respect to a top surface of the substrate, a plurality of non-metal gate patterns surrounding the channels and being stacked on top of each other and spaced apart from each other along the vertical direction, and a plurality of metal gate patterns stacked on top of each other. The metal gate patterns are spaced apart from each other along the vertical direction. Each of the metal gate patterns surrounds a corresponding one of the non-metal gate patterns.
Public/Granted literature
- US20170084532A1 VERTICAL MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2017-03-23
Information query
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