- Patent Title: Thin film bulk acoustic resonator and method for manufacturing same
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Application No.: US14353561Application Date: 2012-06-07
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Publication No.: US10079589B2Publication Date: 2018-09-18
- Inventor: Moon Chul Lee , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Ho Soo Park , Jing Cui
- Applicant: Moon Chul Lee , In Sang Song , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Ho Soo Park , Jing Cui
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2011-0109254 20111025
- International Application: PCT/KR2012/004466 WO 20120607
- International Announcement: WO2013/062203 WO 20130502
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H3/02 ; H01L41/297 ; H01L41/312 ; H01L41/332

Abstract:
A thin film bulk acoustic resonator and a method of manufacturing the same is disclosed. The thin film bulk acoustic resonator includes an acoustic resonator including a first electrode, a second electrode, and a piezoelectric layer disposed between the first electrode and the second electrode; an air gap disposed below the acoustic resonator and above a substrate to reflect the acoustic wave; and an anchor disposed on each of both surfaces of the air gap and having the same thickness as the air gap.
Public/Granted literature
- US20140339959A1 THIN FILM BULK ACOUSTIC RESONATOR AND METHOD FOR MANUFACTURING SAME Public/Granted day:2014-11-20
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