Invention Grant
- Patent Title: Vibrator element, electronic device, electronic apparatus, moving object, and method of manufacturing vibrator element
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Application No.: US14885646Application Date: 2015-10-16
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Publication No.: US10079590B2Publication Date: 2018-09-18
- Inventor: Keiji Nakagawa , Ryuta Nishizawa , Atsushi Matsuo
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-220038 20141029
- Main IPC: H03H9/21
- IPC: H03H9/21 ; H03H3/02 ; G01C19/5607

Abstract:
A vibrator element includes drive vibrating arms extending from an end of a base section, the drive vibrating arms are each provided with an obverse surface, a reverse surface disposed on an opposite side to the obverse surface, and a side surface connecting the obverse surface and the reverse surface to each other, a tilted section facing toward the obverse surface is disposed at least a part of the side surface, and there are disposed a first drive electrode and a second drive electrode obtained by bisection with an electrode separation section disposed in the tilted section.
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