A mask assembly fabrication apparatus includes a first vibration proof apparatus formed on a base surface, a first surface plate formed on the first vibration proof apparatus, stages formed on the first surface plate, a mask frame placed on the stages, a second vibration proof apparatus formed on the base surface to be separate from the first vibration proof apparatus, a second surface plate formed on the second vibration proof apparatus to be separate from the first surface plate, and a driving unit formed on the second surface plate and configured to move a mask.