Invention Grant
- Patent Title: Stacked device and associated layout structure
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Application No.: US15595783Application Date: 2017-05-15
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Publication No.: US10083869B2Publication Date: 2018-09-25
- Inventor: Ta-Pen Guo , Carlos H. Diaz , Chih-Hao Wang , Jean-Pierre Colinge
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L27/085
- IPC: H01L27/085 ; H01L21/822 ; H01L27/088 ; H01L21/8234 ; H01L21/8238 ; H01L27/092 ; H01L29/423 ; H01L23/522 ; H01L23/528 ; H01L29/78

Abstract:
Stacked devices and circuits formed by stacked devices are described. In accordance with some embodiments, a semiconductor post extends vertically from a substrate. A first source/drain region is in the semiconductor post. A first gate electrode layer laterally surrounds the semiconductor post and is vertically above the first source/drain region. A first gate dielectric layer is interposed between the first gate electrode layer and the semiconductor post. A second source/drain region is in the semiconductor post and is vertically above the first gate electrode layer. The second source/drain region is connected to a power supply node. A second gate electrode layer laterally surrounds the semiconductor post and is vertically above the second source/drain region. A second gate dielectric layer is interposed between the second gate electrode layer and the semiconductor post. A third source/drain region is in the semiconductor post and is vertically above the second gate electrode layer.
Public/Granted literature
- US20170250115A1 Stacked Device and Associated Layout Structure Public/Granted day:2017-08-31
Information query
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