Invention Grant
- Patent Title: Semiconductor structure with uniform gate heights
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Application No.: US15613981Application Date: 2017-06-05
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Publication No.: US10083873B1Publication Date: 2018-09-25
- Inventor: Xing Zhang , Xinyuan Dou , Hong Yu , Zhenyu Hu
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/8234 ; H01L29/10

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to semiconductor structures with uniform gate heights and methods of manufacture. The structure includes: short channel devices in a first area of an integrated circuit die; and long channel devices in a second area of the integrated circuit die. The long channel devices have a same gate height as the short channel devices.
Information query
IPC分类: