Invention Grant
- Patent Title: Method for fabricating electronic device with variable resistance material layer
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Application No.: US15369814Application Date: 2016-12-05
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Publication No.: US10084131B2Publication Date: 2018-09-25
- Inventor: Sang-Soo Kim , Jung-Nam Kim
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Perkins Coie LLP
- Priority: KR10-2015-0053122 20150415
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L43/12 ; H01L43/02 ; H01L43/08 ; H01L43/10

Abstract:
A method for fabricating an electronic device including a semiconductor memory may include: forming a first interlayer dielectric layer over a substrate to have an opening exposing the substrate; forming a bottom electrode in a portion of the opening to have an exposed top surface; forming a variable resistance material layer along sidewalls of the remaining portion of the opening and the exposed top surface of the bottom electrode; forming a top electrode over the variable resistance material layer so as to fill the opening; etching the first interlayer dielectric layer to a predetermined depth to expose a part of the variable resistance material layer surrounding sidewalls of the top electrode; and removing the part of the variable resistance material layer to form a unit cell.
Public/Granted literature
- US20170084836A1 METHOD FOR FABRICATING ELECTRONIC DEVICE WITH VARIABLE RESISTANCE MATERIAL LAYER Public/Granted day:2017-03-23
Information query
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