Method for fabricating electronic device with variable resistance material layer
Abstract:
A method for fabricating an electronic device including a semiconductor memory may include: forming a first interlayer dielectric layer over a substrate to have an opening exposing the substrate; forming a bottom electrode in a portion of the opening to have an exposed top surface; forming a variable resistance material layer along sidewalls of the remaining portion of the opening and the exposed top surface of the bottom electrode; forming a top electrode over the variable resistance material layer so as to fill the opening; etching the first interlayer dielectric layer to a predetermined depth to expose a part of the variable resistance material layer surrounding sidewalls of the top electrode; and removing the part of the variable resistance material layer to form a unit cell.
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