Invention Grant
- Patent Title: Ultrasonic device, method for producing ultrasonic device, ultrasonic probe, ultrasonic measurement apparatus, and electronic device
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Application No.: US14839056Application Date: 2015-08-28
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Publication No.: US10085720B2Publication Date: 2018-10-02
- Inventor: Kanechika Kiyose , Nobuaki Hashimoto
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2014-175113 20140829
- Main IPC: A61B8/00
- IPC: A61B8/00 ; A61B8/08 ; G01N29/24 ; G01N29/34 ; G01S15/89 ; G01S7/52 ; B06B1/06

Abstract:
An ultrasonic device includes an element substrate and a wiring substrate. The element substrate includes an ultrasonic element and an element interconnect terminal connected to the ultrasonic element. The wiring substrate includes a wiring terminal and an opening portion that defines an opening extending through the wiring substrate. The element interconnect terminal and the wiring terminal are connected so as to oppose each other. The opening portion encloses the ultrasonic element in plan view as seen from a thickness direction of the wiring substrate.
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