Invention Grant
- Patent Title: Evaporation apparatus and evaporation method
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Application No.: US15314980Application Date: 2015-06-03
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Publication No.: US10087516B2Publication Date: 2018-10-02
- Inventor: Kazuki Matsunaga , Katsuhiro Kikuchi , Shinichi Kawato , Takashi Ochi , Yuhki Kobayashi
- Applicant: Sharp Kabushiki Kaisha
- Applicant Address: JP Sakai
- Assignee: Sharp Kabushiki Kaisha
- Current Assignee: Sharp Kabushiki Kaisha
- Current Assignee Address: JP Sakai
- Agency: Keating & Bennett, LLP
- Priority: JP2014-115103 20140603
- International Application: PCT/JP2015/066018 WO 20150603
- International Announcement: WO2015/186732 WO 20151210
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C14/24 ; C23C14/04

Abstract:
An evaporation apparatus includes: a substrate holding section configured to hold a substrate; an evaporation mask having an opening part at a position which is opposite to one surface of the substrate; an evaporation source configured to supply the one surface with evaporated particles via the opening part and to form a film of the evaporated particles on the one surface exposed from the opening part; and a film thickness correction means configured to block a portion of an ejection path of the evaporated particles from the evaporation source toward the opening part and configured to correct a thickness of the film by changing a position at which the ejection path is blocked over time.
Public/Granted literature
- US20170198387A1 EVAPORATION APPARATUS AND EVAPORATION METHOD Public/Granted day:2017-07-13
Information query
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