- Patent Title: Vapor delivery method and apparatus for solid and liquid precursors
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Application No.: US15595788Application Date: 2017-05-15
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Publication No.: US10087523B2Publication Date: 2018-10-02
- Inventor: Joshua Collins , Eric H. Lenz , Michal Danek
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C23C16/448
- IPC: C23C16/448 ; C23C16/455 ; C23C16/52
Abstract:
A vaporizer system is provided that allows for rapid shifts in the flow rate of a vaporized reactant while maintaining a constant overall flow rate of vaporized reactant and carrier gas.
Public/Granted literature
- US20170335450A1 VAPOR DELIVERY METHOD AND APPARATUS FOR SOLID AND LIQUID PRECURSORS Public/Granted day:2017-11-23
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