Invention Grant
- Patent Title: Seal rings in electrochemical processors
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Application No.: US15423298Application Date: 2017-02-02
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Publication No.: US10087543B2Publication Date: 2018-10-02
- Inventor: Nolan L. Zimmerman , George Mattinger , Gregory J. Wilson , Eric A. Englhardt , Balamurugan Ramasamy
- Applicant: APPLIED Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Perkins Coie LLP
- Agent Kenneth H. Ohriner
- Main IPC: F16J9/00
- IPC: F16J9/00 ; C25D17/00 ; F16J15/3236 ; F16J15/3204 ; F16J15/16 ; F16J15/00 ; F16J15/02

Abstract:
A seal ring for an electrochemical processor does not slip or deflect laterally when pressed against a wafer surface. The seal ring may be on a rotor of the processor, with the seal ring having an outer wall joined to a tip arc through an end. The outer wall may be a straight wall. A relatively rigid support ring may be attached to the seal ring, to provide a more precise sealing dimension. Knife edge seal rings that slip or deflect laterally on the wafer surface may also be used. In these designs, the slipping is substantially uniform and consistent, resulting in improved performance.
Public/Granted literature
- US20170145582A1 SEAL RINGS IN ELECTROCHEMICAL PROCESSORS Public/Granted day:2017-05-25
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