Method for producing sic single crystal having low defects by solution process
Abstract:
A SiC single crystal having low density of threading screw dislocations, threading edge dislocations, micropipe defects, base plane dislocations and stacking faults is provided. This is achieved by a method for producing a SiC single crystal in which a SiC seed crystal substrate is contacted with a Si—C solution having a temperature gradient such that the temperature decreases from the interior toward the surface, to grow a SiC single crystal, the method including: a first step in which a SiC single crystal is grown with a (1-100) plane as the growth surface, a second step in which a {0001} plane is exposed from the grown SiC single crystal, and a third step in which the SiC single crystal having the exposed {0001} plane is used as a seed crystal, and the {0001} plane is used as the growth surface for growth of a SiC single crystal.
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