Invention Grant
- Patent Title: Method for producing sic single crystal having low defects by solution process
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Application No.: US15021762Application Date: 2014-09-01
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Publication No.: US10087549B2Publication Date: 2018-10-02
- Inventor: Katsunori Danno
- Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Applicant Address: JP Toyota
- Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee Address: JP Toyota
- Agency: Oliff PLC
- Priority: JP2013-191191 20130913
- International Application: PCT/JP2014/072927 WO 20140901
- International Announcement: WO2015/037465 WO 20150319
- Main IPC: C30B19/12
- IPC: C30B19/12 ; C30B29/36 ; C30B19/04

Abstract:
A SiC single crystal having low density of threading screw dislocations, threading edge dislocations, micropipe defects, base plane dislocations and stacking faults is provided. This is achieved by a method for producing a SiC single crystal in which a SiC seed crystal substrate is contacted with a Si—C solution having a temperature gradient such that the temperature decreases from the interior toward the surface, to grow a SiC single crystal, the method including: a first step in which a SiC single crystal is grown with a (1-100) plane as the growth surface, a second step in which a {0001} plane is exposed from the grown SiC single crystal, and a third step in which the SiC single crystal having the exposed {0001} plane is used as a seed crystal, and the {0001} plane is used as the growth surface for growth of a SiC single crystal.
Public/Granted literature
- US20160230309A1 SIC SINGLE CRYSTAL AND METHOD FOR PRODUCING SAME Public/Granted day:2016-08-11
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