There are included a probe that can be arranged in an imaging field of view, a horizontal drive section for causing the probe to contact a side surface of a workpiece on a stage, a display section for displaying a model image, a contact position designation section for receiving designation of contact target position information in the model image, a characteristic amount information setting section for setting characteristic amount information, a measurement setting information storage section for storing a plurality of pieces of contact target position information and the characteristic amount information, and a measurement control section for identifying a position and an attitude of the workpiece from a workpiece image by using the characteristic amount information, for identifying a plurality of contact target positions on the side surface of the workpiece where the probe should contact, based on the identified position and the identified attitude of the workpiece.