Invention Grant
- Patent Title: Coaxial wire and optical fiber trace via hybrid structures and methods to manufacture
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Application No.: US15347368Application Date: 2016-11-09
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Publication No.: US10088642B2Publication Date: 2018-10-02
- Inventor: Daniel J. Buvid , Eric J. Campbell , Sarah K. Czaplewski , Christopher W. Steffen
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Robert R. Williams
- Main IPC: H01B13/20
- IPC: H01B13/20 ; G02B6/44 ; H01L23/498 ; H01L21/48 ; H01L21/56 ; G02B6/02 ; H01B13/016

Abstract:
A method of forming a coaxial wire that includes providing a sacrificial trace structure using an additive forming method, the sacrificial trace structure having a geometry for the coaxial wire, and forming a continuous seed metal layer on the sacrificial trace structure. The sacrificial trace structure may be removed and a first interconnect metal layer may be formed on the continuous seed layer. An electrically insulative layer may then be formed on the first interconnect metal layer, and a second interconnect metal layer is formed on the electrically insulative layer. Thereafter, a dielectric material is formed on the second interconnect metal layer to encapsulate a majority of an assembly of the first interconnect metal layer, electrically insulative layer and second interconnect metal layer that provides said coaxial wire. Ends of the coaxial wire may be exposed through opposing surfaces of the dielectric material to provide that the coaxial wire extends through that dielectric material.
Public/Granted literature
- US20180129002A1 COAXIAL WIRE AND OPTICAL FIBER TRACE VIA HYBRID STRUCTURES AND METHODS TO MANUFACTURE Public/Granted day:2018-05-10
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