Invention Grant
- Patent Title: Plasma reactor with inductive excitation of plasma and efficient removal of heat from the excitation coil
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Application No.: US14665684Application Date: 2015-03-23
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Publication No.: US10090134B2Publication Date: 2018-10-02
- Inventor: Valery Godyak
- Applicant: Mattson Technology, Inc.
- Applicant Address: US CA Fremont
- Assignee: Mattson Technology, Inc.
- Current Assignee: Mattson Technology, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Dority & Manning, P.A.
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/326 ; H01J37/32 ; H05H1/46

Abstract:
The plasma reactor of the invention is intended for treating the surfaces of objects such as semiconductor wafers and large display panels, or the like, with plasma. The main part of the plasma reactor is an array of RF antenna cells, which are deeply immersed into the interior of the working chamber. Each antenna cell has a ferromagnetic core with a heat conductor and a coil wound onto the core. The core and coil are sealed in the protective cap. Deep immersion of the antenna cells having the structure of the invention provides high efficiency of plasma excitation, while the arrangement of the plasma cells and possibility of their individual adjustment provide high uniformity of plasma distribution and possibility of adjusting plasma parameters, such as plasma density, in a wide range.
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