Invention Grant
- Patent Title: Semiconductor stocker systems and methods
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Application No.: US13537031Application Date: 2012-06-28
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Publication No.: US10090179B2Publication Date: 2018-10-02
- Inventor: Lutz Rebstock
- Applicant: Lutz Rebstock
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/673 ; B65B5/08 ; B65B31/04 ; B65B35/16 ; B65B63/08 ; H01L21/677
Abstract:
In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the articles stored within the workpieces. A robot can be used to detect the condition of the storage compartment before delivering the workpiece. A monitor device can be used to monitor the conditions of the stocker.
Public/Granted literature
- US20130004268A1 Semiconductor Stocker Systems And Methods Public/Granted day:2013-01-03
Information query
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