Invention Grant
- Patent Title: Pre-collapsed CMUT with mechanical collapse retention
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Application No.: US13203751Application Date: 2010-02-10
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Publication No.: US10092270B2Publication Date: 2018-10-09
- Inventor: Peter Dirksen
- Applicant: Peter Dirksen
- Applicant Address: NL Eindhoven
- Assignee: KONINKLIJKE PHILIPS ELECTRONICS N.V.
- Current Assignee: KONINKLIJKE PHILIPS ELECTRONICS N.V.
- Current Assignee Address: NL Eindhoven
- International Application: PCT/IB2010/050614 WO 20100210
- International Announcement: WO2010/097729 WO 20100902
- Main IPC: A61H1/00
- IPC: A61H1/00 ; A61B8/00 ; B06B1/02

Abstract:
A CMUT transducer cell suitable for use in an ultrasonic CMUT transducer array has a membrane with a first electrode, a substrate with a second electrode, and a cavity between the membrane and the substrate. The CMUT is operated in a precollapsed state by biasing the membrane to a collapsed condition with the floor of the cavity, and a lens is cast over the collapsed membrane. When the lens material has polymerized or is of a sufficient stiffness, the bias voltage is removed and the lens material retains the membrane in the collapsed state.
Public/Granted literature
- US20120010538A1 PRE-COLLAPSED CMUT WITH MECHANICAL COLLAPSE RETENTION Public/Granted day:2012-01-12
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