Invention Grant
- Patent Title: Wafer tray sorter with door coupled to detector
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Application No.: US15386799Application Date: 2016-12-21
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Publication No.: US10092929B2Publication Date: 2018-10-09
- Inventor: Anthony C. Bonora , Brian Compian , Jeff P. Henderson , Robert W. Carlson
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Martine Penilla Group, LLP
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B07C5/34 ; B07C5/00 ; B25J15/00 ; B25J15/02 ; H01L21/67 ; H01L21/687 ; G01N35/04
Abstract:
A tray engine includes a vertical drive column, a rotation mechanism for rotating the vertical drive column, and an end effector attached to the vertical drive column. The end effector includes an end effector base attached to the vertical drive column. The end effector further includes a slide attached to the end effector base to support a tray, when present. The slide enables the tray to slide along a length of the end effector base. The tray engine includes a drive mechanism attached to the end effector base for moving along the length of the end effector base to enable the tray, when present, to slide linearly along the length and load or unload the tray to or from the slide.
Public/Granted literature
- US20170100750A1 Tray Engine With Slide Attached To An End Effector Base Public/Granted day:2017-04-13
Information query
IPC分类:
