Invention Grant
- Patent Title: Liquid discharge apparatus, imprint apparatus, and article manufacturing method
-
Application No.: US14794386Application Date: 2015-07-08
-
Publication No.: US10093103B2Publication Date: 2018-10-09
- Inventor: Yoshimasa Araki , Koichi Kitakami , Tsuyoshi Arai , Yutaka Mita
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2014-143659 20140711
- Main IPC: B41J2/175
- IPC: B41J2/175 ; B29C64/112 ; B29C64/20 ; B33Y30/00 ; B33Y40/00

Abstract:
A liquid discharge apparatus includes: a container divided into a first chamber and a second chamber by a dividing member, the first chamber including a discharge outlet that discharges a liquid and configured to contain the liquid, the second chamber configured to contain a fluid; a tank configured to store the fluid; a connecting portion that provides fluid communication between the tank and the second chamber; a measurement unit configured to measure an amount of the fluid supplied from the tank to the second chamber; and a controller configured to obtain an amount of the liquid contained in the first chamber based on a measurement result from the measurement unit.
Public/Granted literature
- US20160009007A1 LIQUID DISCHARGE APPARATUS, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD Public/Granted day:2016-01-14
Information query
IPC分类: